The EuroNanoLab distributed research infrastructure invites researchers and process engineers to participate in the 2nd EuroNanoLab Experts School: Dry Etching, taking place 26–29 May 2026 at the Instituto Superior Técnico Taguspark campus in Oeiras, Portugal.
The event is hosted by INESC MN and follows the success of the first edition held in 2024 in Enschede, The Netherlands. The school strengthens the four main pillars of the EuroNanoLab consortium:
- Enhancing excellence by building superior processing competence
- Accelerating research through process exchange and access to micro- and nanofabrication research infrastructure
- Sharing competencies by defining European standards in cleanroom procedures
- Strengthening cooperation by building an alliance between scientists and micro- and nanofabrication experts
Lectures will be delivered by internationally recognised academic and industrial experts in the field. The programme aims to educate and train process engineers on various aspects of dry etching, including fundamental principles, plasma sources, process simulation and modelling, and diverse applications.
The school will also provide a platform for experts in plasma etching technologies to exchange ideas, discuss recent achievements and challenges, and explore advances in equipment hardware and processing technologies.s.
